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Equipment:
Acidsink - Polypro Acid Wet Bench
AFM - VEECO DI3100 Atomic Force Microscope
AGRTP - Integra AG RTP
ALD - Atomic Layer Deposition
BNP - Doped Ox and Anneal Furnace
CHA - Old CHA Evaporator
CHANEW - New CHA Evaporator
CL2ETCH - Chlorine Etcher
CVC - CVC Sputterer
Dektak - Dektak 8 Profilometer
Dektak6 - Dektak 6 Surface Profile Measuring System
Denton - Discovery Denton Sputterer
DRIE - Unaxis DRIE
EDAX - EDAX Genesis
Ellipsometer - Ellipsometer (Gaertner)
FDRIE - DSE II Silicon Etch
FIB - Nova 600 FIB
Filmtek - Filmtek 2000
HFBOE - HF-BOE
HTOYellow - High Temp Oven-Yellow Room
KarlSuss_1 - Karl Suss 1
KarlSuss_2 - Karl Suss 2
KarlSussBonder - Karl Suss Bonder
Leica - EBL 100 Electron Beam Lithography
LogiCDP - Logitech CDP
Logitech - Logitech PM5
LTO - LPCVD LTO
MaskWriter - Mask Writer Heidelberg DWL 66 Laser Writer
Matrix105 - Matrix Asher
Microscopes - Microscopes
MM - M & M Probe Station
Nanospec - Nanospec
Nitride - LPCVD Nitride-Stnd
Nitride-LS - LPCVD Nitride-LowStress
Oxford - Oxford RIE
Oxidation - Oxidation Furnace
ParalyneCoater - Paralyne Coater
PECVD - PECVD-Unaxis
PFCsink - PFC Sink
Polysilicon - LPCVD Polysilicon
Porous - Porous Silicon Etcher
Prometrix - Prometrix 4 point probe
RTP - RTA Silicon
RTPold - RTA III-V
SCD - Tousimis Supercritical Dryer
SEM - Hitachi S4700 SEM
SLOAN - Sloan Evaporator
solventsink - Steel Solvent Wet Bench
SopraGES5 - Sopra GES5 Ellipsometer
Spinners - Spin Coaters
STS_AOE - AOE Oxide Etcher
STSMESC - PECVD-STS
TechnicsFRIE - Technics FRIE
Tegal - Tegal Asher
Tencor - Tencor Flexus Stress Tester
UlvacNLD570 - Ulvac Oxide Etcher
WycoNT3300 - Wyko NT3300 Optical Profiler
XEF2 - XEF2 Etcher
Polypro Acid Wet Bench
Short Name:
Acidsink
Category:
Chemical Processing/Wet Clean & Etch
Super Users:
Daniel Gossett
Jere Harrison
Pradeep Senanayake
Status:
Ready
Trainings Required:
1
Location:
Yellow Room
Comments:
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